Laboratoire de Physique et Chimie de Nano-Objets
Institut National des Sciences Appliquées
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135 avenue de Rangueil, 31077 TOULOUSE CEDEX 4 - FRANCE
Tél : 00 33 05 61 55 96 51 | Fax : (+33) (0)5 61 55 96 97
Accueil du site > LPCNO > Publications > Articles > 2001 > The generic nature of the Smart-Cut® process for thin film transfer
B. Aspar, H. Moriceau, E. Jalaguier, C.Lagahe, A.Soubie, B.Biasse, A.M. Papon, A.Claverie, J.Grisolia, G.Ben Assayag, F. Letertre, O. Rayssac, T. Barge, C. Maleville, B.Ghyselen.
The generic nature of the Smart-Cut® process for thin film transfer
Journal of Electronic materials, vol. 30, N°7, 2001.
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