Laboratoire de Physique et Chimie de Nano-Objets
Institut National des Sciences Appliquées
135 avenue de Rangueil, 31077 TOULOUSE CEDEX 4 - FRANCE
Tél : 00 33 05 61 55 96 51 | Fax : (+33) (0)5 61 55 96 97
135 avenue de Rangueil, 31077 TOULOUSE CEDEX 4 - FRANCE
Tél : 00 33 05 61 55 96 51 | Fax : (+33) (0)5 61 55 96 97
Accueil du site > LPCNO > Publications > Articles > 2007 > Fabrication of planar ferromagnetic electrodes separated by a sub-10nm gap using high resolution electron beam lithography with negative PMMA
J. Grisolia, L. Ressier, C. Martin, J. P. Peyrade, B. Viallet and C. Vieu
Fabrication of planar ferromagnetic electrodes separated by a sub-10nm gap using high resolution electron beam lithography with negative PMMA
ULTRA-MICROSCOPY, 107/10-11, 985-988 (2007)
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